Products Description
Product Specifications
| Standards | ASTM A269, ASTM A632, SEMI F19, SEMI F20 |
| Steel Grades | TP316L (UNS S31603) |
| Equivalent Standards | EN 10216-5: 1.4404 / 1.4435;JIS G3459: SUS316L;ASME BPVC Section II SA-269 TP316L. |
| Outer Diameter (OD) | 1/8" – 4" (3.18mm – 101.6mm) |
| Wall Thickness (WT) | 0.035" – 0.120" (0.89mm – 3.05mm) |
| Length | Up to 12m or Coil Form |
| Surface Treatment | Electropolished (EP), Bright Annealed (BA) |
| Production Process | Cold-drawn / Cold-rolled |
| Condition | Solution Annealed,Cleanroom Packed, Double Bagged |
TP316L contains 2.0–3.0% molybdenum, exhibiting excellent resistance to pitting and crevice corrosion (PREN ≥ 24), significantly superior to 304L. Under conditions of chemical transport, such as HCl, HF, and NH₄OH commonly found in semiconductor wet cleaning stations and etching equipment, TP316L Electropolished SS Tubing shows a lower corrosion rate.
The tubing undergoes cold working and surface electropolishing, achieving a surface roughness of Ra ≤ 0.13 µm, reducing fluid resistance and making it suitable for UHP gas systems.
Customized Services
- TORICH offers customized dimensions and tolerances, with outer diameters and wall thicknesses precisely controlled to ±0.025 mm, along with precision cutting and deburring.
- Tubing undergoes final cleaning and dust-free drying in an ISO Class 5 (Class 100) cleanroom, followed by vacuum- or nitrogen-purged packaging in double- or triple-cleanroom-grade bags, complete with traceable external labeling.
- Customized tube-end processing services are available, including square cutting and chamfering, VCR fittings, flaring/flanging, and NPT or G threading.
- Customized surface roughness options are provided: Standard EP (Ra ≤ 0.2 μm), High-Purity EP (Ra ≤ 0.15 μm), and Ultra-High-Purity EP (internal surface Ra ≤ 0.1 μm).
Chemical Composition
| Element | C | Mn | P | S | Si | Cr | Ni | Mo |
|---|---|---|---|---|---|---|---|---|
| TP316L (%) | ≤0.030 | ≤2.00 | ≤0.045 | ≤0.030 | ≤1.00 | 16.0–18.0 | 10.0–14.0 | 2.0–3.0 |
Mechanical Properties
| Property | Tensile Strength (MPa) | Yield Strength (MPa) | Elongation (%) | Hardness (HB) |
| Value | ≥ 485 | ≥ 170 | ≥ 35 | ≤ 95 |
Possible Alternative Grades
- If cost is a primary consideration, TP304L is an option; it contains no molybdenum and is less expensive than TP316L, though it offers inferior pitting corrosion resistance, making it suitable for bulk gas systems in facilities utilizing mature process nodes of 28nm and above.
- 316L VAR serves as a premium upgrade; it offers higher material purity and fewer surface defects, making it suitable for critical process gas piping in the most advanced manufacturing nodes (7nm and below).
- For extremely corrosive environments-such as those involving hydrofluoric acid, concentrated hydrochloric acid, or fluorine-containing chemicals-where TP316L is unsuitable, Hastelloy C-22 is a viable choice, boasting a PREN value exceeding 42.
application areas
- UHP Gas Delivery Systems – High-purity gas distribution for N₂, O₂, H₂, Ar, He, and specialty semiconductor gases.
- Chemical Distribution Systems (CDS) – Transfer of high-purity process chemicals and acids.
- Ultrapure Water (UPW) Systems – Piping for semiconductor-grade ultrapure water distribution.
- Semiconductor Process Equipment – Gas and chemical connections for CVD, PVD, ALD, etching, implantation, and diffusion equipment.
- Gas Cabinets & Valve Manifold Boxes – Internal tubing for gas control and distribution systems.
- Analytical Instrumentation – High-purity tubing for GC, MS, FTIR, and process monitoring equipment.
Products Show
Testing Equipment
Factory Equipment
Pickling equipment
Products Package
FAQ
Q: What is the typical inner surface finish of your electropolished tubing?
A: We use electropolished stainless steel tubing that conforms to ASTM A269 standards. The inner surface is extremely smooth, with a typical roughness Ra ≤ 0.4 μm, and can be further refined to Ra ≤ 0.15 μm upon customer request.
Q: How do you ensure high-dimensional accuracy of the tubing?
A: Dimensional accuracy is ensured through precision cold drawing, controlled annealing, and strict electropolishing process control. Each tube undergoes inspection for outer diameter, inner diameter, wall thickness, straightness, and ovality, and the measurement results are recorded in the Mill Test Certificate (MTC).
Q: Is this tubing suitable for orbital welding or TIG welding?
A: Yes. Our tubing has excellent weldability. Pre-cleaning is recommended, and post-weld passivation or electropolishing can restore the surface smoothness and corrosion resistance of the tubing in high-purity systems.
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